| 摘要 |
<p>PURPOSE:To place and support each semiconductor wafer in the vertical condition as expected at all times by adjusting the mutual communication width between each slot groove of the boat body member on the side and each slot groove of an adjusting member, by the sliding of the adjusting bar member to the boat body member on the side. CONSTITUTION:An adjusting bar member 15, wherein respective slot grooves 16 communicating with each slot groove 14 are made to correspond to the positions of each slot groove 14 of the boat body member 13 on the side, is one which is set, capably in sliding orthogonally to the directions of each slot groove 14 and 16, to the board body member 13 on the side, and by the sliding operation, the mutual communication width of corresponding each slot groove 14 and 16 can be adjusted optionally, and besides it can be maintained at the adjusted position with sliding resistance at the level of requirement. Even if each slot groove 12, 14, and 16 in each member are widened accompanying the adjustment of the communication width, each semiconductor wafer 17 placed and maintained on each member can be maintained at all times in vertical condition and further at an equal interval.</p> |
