| 摘要 |
PURPOSE:To construct a sensor in small size and enhance its sealing performance and producibility by forming a glass layer through injection, bubble removal, defatting, and baking of a Si type resin. CONSTITUTION:A sensor element is provisionally fixed to a ceramic holder 5 with a ceramic adhesive, inserted in a casing 2 with a protection cover 3 hot attached by pressure, and fixed through a seal ring 4. Tale 6 is fitted by pressure, and a holder 5 is fixed provisionally, and then Si type resin is injected. Bubbles are removed by an exhaust means while decompression is held, followed by temp. rise and defatting. This resin is baked in an oxidative atmosphere, and Si therein is oxidated to become SiO2, and a glass layer 7 is yieled which can sustain high temp. Thus resin intrudes into detainls to enhance the sealing performance, which allows the seal part to be designed short, and the sensor as object of invention can be embodied small. |
