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发明名称
TWO-DIMENSIONAL MOTOR STAGE DEVICE
摘要
申请公布号
JPH04185272(A)
申请公布日期
1992.07.02
申请号
JP19900313231
申请日期
1990.11.19
申请人
SUMITOMO HEAVY IND LTD
发明人
TOMITA YOSHIYUKI;SATO FUMIAKI
分类号
G12B5/00;G05D3/00;H02K41/03
主分类号
G12B5/00
代理机构
代理人
主权项
地址
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