PROCESS FOR THE CHEMICAL VAPOR DEPOSITION OF COPPER,申请号CA19912058483-传众专利搜索

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发明名称	PROCESS FOR THE CHEMICAL VAPOR DEPOSITION OF COPPER
摘要
申请公布号	CA2058483(A1)	申请公布日期	1992.07.01
申请号	CA19912058483	申请日期	1991.12.27
申请人	AIR PRODUCTS AND CHEMICALS, INC.	发明人	NORMAN, JOHN A. T.;DYER, PAUL N.
分类号	C07F1/08;C07C13/263;C07C45/00;C07C49/92;C07F1/00;C23C16/06;C23C16/18;C23F1/12;H01L21/285;H01L21/3213;H01L21/768;(IPC1-7):C23C16/18	主分类号	C07F1/08
代理机构		代理人
主权项
地址

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