REACTIVE ION ETCHING SYSTEM,申请号JP19900312644-传众专利搜索

首页产品黄页商标征信

会员服务注册登录

法人/股东/高管

发明名称	REACTIVE ION ETCHING SYSTEM
摘要
申请公布号	JPH04184925(A)	申请公布日期	1992.07.01
申请号	JP19900312644	申请日期	1990.11.20
申请人	JAPAN SYNTHETIC RUBBER CO LTD	发明人	YANAGIHARA KENJI;NUMATA MASAYUKI;KAWAMURA SHINICHI
分类号	H01L21/302;H01L21/3065	主分类号	H01L21/302
代理机构		代理人
主权项
地址

您可能感兴趣的专利

LOBED BALLOON CATHETER AND METHOD OF USE

METHOD AND DEVICE FOR MEASURING PHYSICAL PARAMETERS IN A PRODUCTION SHAFT OF A DEPOSIT OF UNDERGROUND FLUID STORAGE RESERVOIR

A PROBIOTIC ADHESIN PRODUCT, DERIVED FROM <i>LACTOBACILLUS</i>

METHOD FOR TREATING AN EFFLUENT CONTAINING IN PARTICULAR NITROGEN AND/OR PHOSPHORUS AND/OR ORGANIC MATTER AND/OR HEAVY METALS

CARRIER FREQUENCY RECOVERY USING PUNCTURED FOUR-PHASE MODULATION-DEMODULATION

POLYURETHANE AND THE USE THEREOF FOR MODIFYING RHEOLOGICAL PROPERTIES

RECEIVER COMPRISING BONE-CONDUCTION LOUDSPEAKER

Baugruppe mit Überspannungsableiter für eine Hochspannungsanlage

Handschleifgerät

Method and circuit for determining optical signal to noise ratios by optical transformation

Direct injection lean burning automotive engine has catalytic converter installed at given point in exhaust manifold

Lubricating device for high-speed bearing comprises casing fixed to end of shaft or axle containing ring of oil-absorbent material, channels filled with wick material leading from ring to gap between bearing and shaft

Ansteuerschaltung zur Ansteuerung wenigstens eines Magnetventils für die Kraftstoffzumessung in einer Brennkraftmaschine

Optische Vorrichtung und Harzhärtungsvorrichtung

Surface finishing ends of long polymer components such as data-carrying optical fibers by softening the end and pressing against a flat face

Fixing device for tubular gas generator for airbag has radial spring catch fitted to casing or to gas generator

Broadband signals or power transmission device, has first unit comprising symmetrical open conductor structure and second unit comprising directional coupler

Adapter for fitting new strap to old wristwatch is rectangular piece of material with two angled lateral lugs on two opposing sides accepting sprung pin and rolled section on third side

Method of monitoring and ascertaining the location of an object e.g. for fleet of vehicles, requires using an existing communication network in contact with a central control station

Sensor head for conventional optical printer sheet position sensors has sheet support surface consisting of bridges parallel to sheet transport direction and peripherally mounted on glass cover