| 摘要 |
PURPOSE:To facilitate the wire connection work by forming the cathode and anode electrode terminals and a heater terminal on the surface different from a heater formation surface and installing a ceramic plate on which the heater and the heater terminal are connected. CONSTITUTION:A C-figure shaped heater 6 is formed integrally with the lead parts 6a1 and 6b1 on one surface of a ceramic plate 5, and a cathode electrode terminal 2e which has a large area having a fan shape formed by dividing the whole area to nearly four parts, anode electrode terminal 2f, and the heater terminals 6e and 6f are formed on the other surface. Further, lead parts 6a1, and 6b1 and heater terminals 6e and 6f are connected by the printed conductors 9a and 9b set along the outer periphery of the plate 5. Accordingly, the plate 5 has the heater 6 on one surface and has the terminals 2e, 2f, 6e, and 6f on the other surface, and the heater 6 and the terminals 6e and 6f are connected by conductors 9a and 9b. |
