| 摘要 |
PURPOSE:To prevent a decline in laser output of a gas laser device caused by a breakdown voltage between paired electrodes by making one of paired standby ionization electrodes freely movable and making a moving mechanism operable from the outside of a laser tube. CONSTITUTION:When an adjusting screw 19 is screwed in a tapped hole 18 provided at a position corresponding to the supporting body 16 of a holding plate 2, the flange 6b of an upper pin electrode 6 is pushed and the electrode interval G between the electrode 6 and a lower pin electrode 7 is reduced. The screw 19 is formed of a synthetic resin and its upper part protrudes from a laser tuber 1 through a seal member 21 in an airtight state. The interval G can be adjusting by rotating an operating section 22. In case the laser oscillation frequency is about 1kHz, a main discharge space 13 can be preliminarily ionized without lowering the preliminary ionization breakdown voltage between the electrodes 6 and 7 when the interval G is set at 1-2mm. The interval G must be increased when the oscillation frequency is >=2.5kHz. When such constitution is used, the preliminary ionization can be performed stably without lowering the laser output. |
