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发明名称
DIFFUSION USING A SOLID STATE SOURCE
摘要
申请公布号
US5126281(A)
申请公布日期
1992.06.30
申请号
US19900580730
申请日期
1990.09.11
申请人
HEWLETT-PACKARD COMPANY
发明人
CAREY, KENT A. W.;WILLIAMSON, JAMES B.;LOW, THOMAS S.;CHANG, JAMES S. C.
分类号
C30B31/02;H01L21/22;H01L21/225
主分类号
C30B31/02
代理机构
代理人
主权项
地址
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