Electrostatic dust collector for use in vacuum system

摘要

An electrostatic dust collector including a wall enclosing a vacuum chamber in which a target face to be subjected to dust removal is provided, a radiation emitting device for emitting radiation to dust on the target face so as to charge the dust positively or negatively, a dielectric member which is provided in the vacuum chamber and has a collecting face confronting the target face and a member for imparting negative or positive potential to the collecting face such that the dust charged oppositely is attracted to the collecting face.