| 摘要 |
A positioning system for accurately positioning components and the like in which a two-dimensional linear motor moves upon an air bearing across a large platen having a predetermined grid pattern yielding reasonably good resolution. A second two-dimensional positioning assembly of extremely fine resolution is secured to the linear motor arranged to traverse the large platen. Location sensors are provided in closed loop feedback system for detecting the X and Y positions. Coarse resolution is obtained by operating the first two-dimensional linear motor and fine resolution is obtained by operating the second two-dimensional positioning assembly, preferably after disabling the air bearing. The fine positioning system may also include a driver motor for rotating a manipulator arranged upon the second positioning system to correct for any angular misalignment of the component being placed by the manipulator.
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