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发明名称
STRUCTURE OF MAGNET FOR PLANAR MAGNETRON SPUTTERING SOURCE
摘要
申请公布号
JPH04183857(A)
申请公布日期
1992.06.30
申请号
JP19900310751
申请日期
1990.11.16
申请人
TOKUDA SEISAKUSHO LTD
发明人
UTSUNOMIYA NOBUAKI
分类号
C23C14/35
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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