FORMATION OF THIN DIELECTRIC FILM,申请号JP19900313725-传众专利搜索

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发明名称	FORMATION OF THIN DIELECTRIC FILM
摘要
申请公布号	JPH04183850(A)	申请公布日期	1992.06.30
申请号	JP19900313725	申请日期	1990.11.19
申请人	NEC CORP	发明人	YAMAGUCHI HIROSHI;MATSUBARA SHOGO;MIYASAKA YOICHI;SAKUMA TOSHIYUKI;YAMAMICHI SHINTARO
分类号	C23C14/08;C23C14/24	主分类号	C23C14/08
代理机构		代理人
主权项
地址

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