| 摘要 |
<p>PURPOSE:To eliminate the unequalness of a coated film and the failure of a substrate, etc., by having a smooth and flat layer formed by a heating and spraying method using an org. high polymer having the molecular structure to allow easy free rotation. CONSTITUTION:Colored films 2 are formed in the form of stripes having 90mum width and about 2.0mum film thickness as color filters on the glass substrate. The surface undulations of the films 2 are kept at 1.0mum max. step. A xylene soln. of polymethyl methacrylate having 2,000 average mol. wt. and 1,500 to 2,500mol.wt. distribution is sprayed thereon by a heating and spraying device 6 which sprays the soln. not by using an air pressure for discharging but by pressing the soln. to the material and by heating a spray nozzle 7 to 60 deg.C. The substrate is thereafter rested at room temp. and is then heated to obtain 4mum film thickness. The surface undulations of this time are 0.07mum max. step and decrease considerably from 2.0mum thickness and 1.0mum max. step of the initial film 2. The film is thus smoothed and flattened. The film deposition and photolithographic characteristic are improved in this way.</p> |
