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发明名称
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04181729(A)
申请公布日期
1992.06.29
申请号
JP19900310605
申请日期
1990.11.15
申请人
MITSUBISHI ELECTRIC CORP
发明人
SHIMURA TERUYUKI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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