| 摘要 |
<p>PURPOSE:To effectively detect the very small leak of a vacuum by a method wherein a valve is shut, a vacuum chuck is shut off from a vacuum source, the vacuum level of a vacuum confined between a semiconductor, the vacuum chuck and the valve is detected and it is judged whether the vacuum level is dropped from a prescribed value. CONSTITUTION:A semiconductor 1 is put on a vacuum chuck 10; a valve 24 installed between a vacuum source 22 and the vacuum chuck 10 is opened; the vacuum level of a pipe passage connecting the vacuum chuck 10 to the valve 24 is detected. Then, it is judged whether the vacuum level of a pipe passage connecting the vacuum chuck 10 to the valve 24 is dropped from a prescribed value during a prescribed time since the valve 24 has been shut. Thereby, the very small leak of a vacuum is detected. Consequently, it is possible to detect the very small leak, of the vacuum between the vacuum chuck 10 and the semiconductor 1, which cannot be detected by using an ordinary vacuum gauge. Thereby, it is possible to effectively detect the very small leak of the vacuum.</p> |
