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发明名称
CHECKING METHOD FOR ABRASION OF SOCKET FOR MEASURING CHARACTERISTIC OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04181175(A)
申请公布日期
1992.06.29
申请号
JP19900309713
申请日期
1990.11.15
申请人
NEC YAMAGATA LTD
发明人
SUZUKI MASASHI
分类号
G01R31/26;G01N27/04;G01R31/00;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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