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发明名称
FLUID FLOW PASSAGE SWITCHING METHOD AND ITS DEVICE, AND SURFACE TREATING PROCESSING METHOD FOR WORKPIECE USING THE ABOVE DEVICE
摘要
申请公布号
JPH04181006(A)
申请公布日期
1992.06.29
申请号
JP19900304085
申请日期
1990.11.13
申请人
SONY CORP
发明人
KURODA MASAYUKI
分类号
B24C5/04;B24C7/00;F15D1/02
主分类号
B24C5/04
代理机构
代理人
主权项
地址
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