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发明名称
SEMICONDUCTOR HEAT TREATMENT DEVICE
摘要
申请公布号
JPH04180620(A)
申请公布日期
1992.06.26
申请号
JP19900309739
申请日期
1990.11.15
申请人
NEC YAMAGATA LTD
发明人
ISHIZAKI KATSUTOSHI
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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