| 摘要 |
<p>PURPOSE:To prevent the resticking of foreign matter to a reticle by forming a gelatin-based thin film on the reticle, hardening the film by irradiation with IR, peeling the hardened film from the surface of the reticle, adsorbing and removing foreign matter on the reticle. CONSTITUTION:A reticle 1 is set in the central opening 5B in a stage 5 for forming a thin film. A nozzle 6 for dropping liq. chemicals is set above the stage 5 and a gelatin-based thin film 4 is formed on the stage 5 by moving the nozzle 6 from right to left with a pulse motor 8 while dropping liq. chemicals through a pipe 7. The film 4 is then hardened by irradiation with IR from an IR radiating part 9 and the hardened film 4 is peeled from the surface of the reticle 1 by lowering reticle supporting rods 3. At the same time, foreign matter 10 on the reticle 1 is adsorbed and removed. The resticking of foreign matter in a washing soln. to the reticle can be prevented.</p> |
