| 摘要 |
<p>PURPOSE:To improve element characteristics and reliability and to obtain the stable nonlinear element by forming an insulator layer for regulating an element area to a circular shape on a lower electrode, then forming a nonlinear electrical conduction inducing layer. CONSTITUTION:Metallic chromium or metallic aluminum is continuously deposited as the lower electrode material on a base body 21 and is etched to a prescribed shape to form the lower electrodes 11, 22. After photosensitive polyimide is applied thereon, the coating is subjected to photopatterning to allow the part corresponding to the element to remain and to form the insulator layer 13 regulating the element part by covering this part. The aperture 12 of the insulator layer 23 is formed to a circular shape at this time. Further, the nonlinear electrical conduction inducing layer 24 and an upper electrode 25 are further formed to obtain the nonlinear element.</p> |
