| 摘要 |
PURPOSE:To eliminate the need to change manually the setting of discharge pressure and time separately by transmitting a signal to a discharge device main body by way of a signal line from a weighing apparatus and halting the discharge of liquid when discharged liquid amounts to a set level. CONSTITUTION:A liquid discharge device is installed on a semiconductor device, which discharges a constant amount of liquid where pressure is applied to a vessel which contains liquid. The liquid 2 is discharged, which is measured with a weighting apparatus 8 on the semiconductor device on a carrier rail 7. When the discharged liquid reaches a preset value, a signal is transmitted to a discharge device main body by way of a signal line 9 from the weighing apparatus 8 so that the discharge of the liquid may be halted. In this manner, the weighting apparatus which measures the weight of discharged liquid and the signal line, if installed, eliminates the need to change the setting of discharge pressure and time one by one even when the discharged liquid is increased or decreased. |
