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发明名称
ION SOURCE DEVICE
摘要
申请公布号
JPH04180570(A)
申请公布日期
1992.06.26
申请号
JP19900312239
申请日期
1990.11.15
申请人
MITSUBISHI ELECTRIC CORP
发明人
ITO HIROMOTO
分类号
C23C16/50
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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