MIKROVENTIL

摘要

A microvalve with a multi-layer structure for regulating or controlling fluid flows is proposed. In a first layer at least one feed connector, a first return connector, at least two working connectors and at least a second return connector are structured. The microvalve has a second layer which is connected via an at least first structured intermediate layer with the first layer. Means are structured in the second layer which are electrostatically operable and by means of which the degree of opening of the at least one feed connector can be changed. The microvalve is constructed symmetrically in respect to the second layer, in that a third layer, structured mirror-reversed in respect to the first layer, is applied to the second layer via a further structured intermediate layer. Thus the third layer has at least two further working connectors, at least one further feed connector and at least two further return connectors, where each two of the connectors located opposite each other in the first layer and the third layer form a pair. At least one flat slider with at least two flow-through openings is structured in the second layer to form an electrostatically operable means.