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发明名称
FORMATION OF BUMP
摘要
申请公布号
JPH04179234(A)
申请公布日期
1992.06.25
申请号
JP19900306446
申请日期
1990.11.14
申请人
TANAKA KIKINZOKU KOGYO KK
发明人
NISHIMORI TAKASHI
分类号
H01L21/60;H01L21/321
主分类号
H01L21/60
代理机构
代理人
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