发明名称 BALL BONDER
摘要 PURPOSE:To form the optimum ball by a method wherein a groove part or a projecting part is provided in or on the plane of the tip part of the electric torch of a ball bonder. CONSTITUTION:The structure of an electric torch 1 of this ball bonder is constituted into a structure, wherein a groove 2a or a projecting part 2b is twistingly provided in or on the plane part, which faces the vertical lower part of a tip of an Au wire 4, of the torch 1. Whereby, dispersion in the intensity of an electric field, which is discharged to the tip of the wire 4, is eliminated by the concentration of a charge on the edge parts of the groove or the projecting part and at the same time, the density of the electric field can be increased. Thereby, the formation of a ball 5 is properly conducted.
申请公布号 JPH04179132(A) 申请公布日期 1992.06.25
申请号 JP19900304265 申请日期 1990.11.09
申请人 NEC YAMAGATA LTD 发明人 KURITA YOSHIMI
分类号 H01L21/60 主分类号 H01L21/60
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