发明名称 STREET RECOGNITION DICING DEVICE
摘要 <p>PURPOSE:To eliminate man-hour and time for switching product types and eliminates the labor for creating device data by providing a street recognition device at a cutting part. CONSTITUTION:A street recognition device 1 is retained at a slide base 3 so that its recognition part center and a center of a blade 4 which is fitted to a spindle 2 are on the same cut line. Then, the slide base 3 is slid in Y-direction and a photo sensor of the street recognition device 1 detects change in quantity of light at a device part on the wafer and a street for recognizing the street and for cutting the recognized street with the blade 4, thus eliminating the need for creating device data for each product type and enabling man-hour and time to be reduced.</p>
申请公布号 JPH04177859(A) 申请公布日期 1992.06.25
申请号 JP19900306906 申请日期 1990.11.13
申请人 NEC KYUSHU LTD 发明人 YASUTAKE HIROYUKI
分类号 H01L21/301;H01L21/78 主分类号 H01L21/301
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