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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04179161(A)
申请公布日期
1992.06.25
申请号
JP19900302763
申请日期
1990.11.09
申请人
ASAHI KASEI MAIKURO SHISUTEMU KK
发明人
SHINOMURA KATSUMI
分类号
H01L27/06;H01L21/8234;H01L27/092
主分类号
H01L27/06
代理机构
代理人
主权项
地址
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