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发明名称
VERFAHREN UND VORRICHTUNG ZUM SPALTEN VON SILICIUMWAFERN.
摘要
申请公布号
DE68901566(D1)
申请公布日期
1992.06.25
申请号
DE19896001566
申请日期
1989.03.21
申请人
COMMISSARIAT A L'ENERGIE ATOMIQUE ETABLISSEMENT DE CARACTERE SCIENTIFIQUE TECHNIQUE ET INDUSTRIEL, PARIS, FR
发明人
CORNU, CLAUDE, F-38610 GIERES, FR;POINARD, ANDRE, F-38140 SAINT PAUL D'IZEAUX, FR
分类号
B28D5/00;(IPC1-7):B28D5/04;B28D7/04
主分类号
B28D5/00
代理机构
代理人
主权项
地址
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