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发明名称
GAS PIPING METHOD
摘要
申请公布号
JPH04179113(A)
申请公布日期
1992.06.25
申请号
JP19900304360
申请日期
1990.11.08
申请人
MATSUSHITA ELECTRON CORP
发明人
SAKAI KATSUO
分类号
B01J4/00;C23C16/44;C23C16/455;H01L21/02;H01L21/205
主分类号
B01J4/00
代理机构
代理人
主权项
地址
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