PLATE SURFACE INSPECTING DEVICE,申请号JP19900304799-传众专利搜索

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发明名称	PLATE SURFACE INSPECTING DEVICE
摘要
申请公布号	JPH04177743(A)	申请公布日期	1992.06.24
申请号	JP19900304799	申请日期	1990.11.09
申请人	NEC CORP	发明人	FUKUSHIMA MIKI
分类号	G01N21/88;H01L21/66;H01L25/00;H01L31/04	主分类号	G01N21/88
代理机构		代理人
主权项
地址

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