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发明名称
SPUTTERING DEVICE
摘要
申请公布号
JPH04176864(A)
申请公布日期
1992.06.24
申请号
JP19900304838
申请日期
1990.11.08
申请人
SHARP CORP
发明人
HIBINO YOSHITAKA;AKAI TOSHIO
分类号
C23C14/34;C23C14/38;C23C14/56;H01L21/203;H01L21/285
主分类号
C23C14/34
代理机构
代理人
主权项
地址
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