METHOD OF FORMING PATTERN,申请号EP19900900997-传众专利搜索

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发明名称	METHOD OF FORMING PATTERN
摘要
申请公布号	EP0402482(A4)	申请公布日期	1992.06.24
申请号	EP19900900997	申请日期	1989.12.15
申请人	OKI ELECTRIC INDUSTRY COMPANY, LIMITED	发明人	UCHIYAMA, AKIRA OKI ELECTRIC INDUSTRY CO., LTD.;IWABUCHI, T. OKI ELECTRIC IND. CO., LTD.
分类号	H01L21/033;H01L21/28;H01L21/3213;H01L21/336;H01L21/768;H01L29/423;(IPC1-7):H01L21/302	主分类号	H01L21/033
代理机构		代理人
主权项
地址

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