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发明名称
MANUFACTURE OF SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH04177729(A)
申请公布日期
1992.06.24
申请号
JP19900303960
申请日期
1990.11.13
申请人
KAWASAKI STEEL CORP
发明人
SUZUKI HIROSHI
分类号
H01L21/316;H01L21/76;H01L29/78
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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