发明名称 Electrostatic drive device and circuit for controlling same
摘要 An electrostatic drive device includes at least one fixed electrode plate provided on a fixed portion, and at least one movable electrode plate provided on a movable portion resiliently supported on the fixed portion so as to move freely. The fixed electrode plate and movable electrode plate are disposed as to oppose each other in parallel relation, and the movable portion is driven by an electrostatic force produced by applying a voltage across the fixed electrode plate and the movable electrode plate.
申请公布号 US5124879(A) 申请公布日期 1992.06.23
申请号 US19900537140 申请日期 1990.06.13
申请人 OMRON CORPORATION 发明人 GOTO, HIROSHI
分类号 G05D3/00;B23Q5/28;G05D3/10;H01L21/68;H02N1/00 主分类号 G05D3/00
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