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发明名称
WAFER TRENCH DEPTH MEASURING DEVICE
摘要
申请公布号
JPH04176144(A)
申请公布日期
1992.06.23
申请号
JP19900303430
申请日期
1990.11.08
申请人
NEC CORP
发明人
OKAWA KATSUHISA
分类号
H01L21/66
主分类号
H01L21/66
代理机构
代理人
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地址
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