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发明名称
DRY-ETCHING DEVICE
摘要
申请公布号
JPH04176122(A)
申请公布日期
1992.06.23
申请号
JP19900303614
申请日期
1990.11.07
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
FUKUDA MASAFUMI;TANAKA YASUO;ISHIDA TOSHIMICHI;OGURA HIROSHI
分类号
C23F4/00;H01L21/302;H01L21/3065
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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