MANUFACTURE OF SEMICONDUCTOR DEVICE AND ION IMPLANTATION MASK MATERIAL THEREFOR,申请号JP19900303463-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR DEVICE AND ION IMPLANTATION MASK MATERIAL THEREFOR
摘要
申请公布号	JPH04176119(A)	申请公布日期	1992.06.23
申请号	JP19900303463	申请日期	1990.11.08
申请人	NEC YAMAGATA LTD	发明人	WATANABE TOKUJIRO
分类号	H01L21/8238;H01L21/266;H01L27/092	主分类号	H01L21/8238
代理机构		代理人
主权项
地址

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