SUSCEPTOR FOR VAPOR GROWTH DEVICE,申请号JP19900303613-传众专利搜索

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发明名称	SUSCEPTOR FOR VAPOR GROWTH DEVICE
摘要
申请公布号	JPH04173977(A)	申请公布日期	1992.06.22
申请号	JP19900303613	申请日期	1990.11.07
申请人	MATSUSHITA ELECTRIC IND CO LTD	发明人	TSUTSUI YUJI;MATSUSHITA YOSHISHIGE;TOYODA SHINICHIRO;YAMAMOTO SHIGEYUKI
分类号	C23C16/46;H01L21/205;H01L21/31	主分类号	C23C16/46
代理机构		代理人
主权项
地址

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