| 摘要 |
PURPOSE:To make the degree of coaxially emitted state of laser beams detectable so as to appropriately irradiate the laser beams even in a special environment by forming an enclosed circuit of a pair of beam splitters and a pair of high-reflecting mirrors and providing an optical resonator at a prescribed position. CONSTITUTION:Laser beams L1, L2, and L3 respectively emitted from laser oscillators 20a, 20b, and 20c having different wavelengths are condensed to a synthetic optical path 23 in a superimposed state through reflecting mirrors 21, 22, 24, and 26 and partial reflecting mirrors 25 and 27. The reflecting mirrors are independently held in a pair by angle adjustment driving mechanisms 28, 29, and 30. A beam splitter 32 provided in the middle section of the optical path 23 branches part of the superimposed beams. The branched beam is made incident to one beam splitter 34s of a resonator 36. A detector 37 is provided in the transmission optical path of the other beam splitter 34b. The signal of the detector 37 is sent to the mechanisms 28, 29, and 30. By using such constitution, coordinate positions of the optical axes of the laser beams L1, L2, and L3 are detected and the three laser beams are adjusted to a coaxial state and, accordingly, appropriate irradiation can be maintained even in a special environment. |
