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发明名称
SEMICONDUCTOR WAFER CLEANING DEVICE
摘要
申请公布号
JPH04171818(A)
申请公布日期
1992.06.19
申请号
JP19900301908
申请日期
1990.11.05
申请人
TAIYO SANSO CO LTD;MITSUBISHI ELECTRIC CORP
发明人
TADA MASUTA;FUKUMOTO HAYAAKI;OMORI TOSHIAKI
分类号
H01L21/304
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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