OPTICAL CVD METHOD,申请号JP19900300288-传众专利搜索

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发明名称	OPTICAL CVD METHOD
摘要
申请公布号	JPH04171919(A)	申请公布日期	1992.06.19
申请号	JP19900300288	申请日期	1990.11.06
申请人	SONY CORP	发明人	WATANABE TETSUO
分类号	H01L21/205;H01L21/31	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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