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发明名称
VAPOR GROWTH METHOD OF SEMICONDUCTOR
摘要
申请公布号
JPH04171812(A)
申请公布日期
1992.06.19
申请号
JP19900299471
申请日期
1990.11.05
申请人
FUJITSU LTD
发明人
ITO HIROMI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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