摘要 |
PURPOSE:To obtain a piezoelectric ceramic whose resistivity is high and which can be polarized even when it is baked in a reducing atmosphere by a method wherein a glass composed of a component whose coefficient of thermal expansion is nearly equal to that of the piezoelectric ceramic and which is hardly reacted with the piezoelectric ceramic is added to a piezoelectric ceramic sintered body. CONSTITUTION:An actuator composed of a piezoelectric ceramic sintered body is formed in such a way that electrode layers 2,... connected to a + terminal and electrode layers 3,... connected to a-terminal are formed between many piezoelectric ceramic layers 1,.... In order to manufacture the actuator, a glass and, as required, a bivalent metal compound such as SrO3, CaCO3, BaCO3 or the like or manganese carbonate are added to a ferro-electric ceramic material such as PZT or the like; they are kneaded; a sheetlike ceramic green sheet is formed; an electrode-material paste of Cu or Ni is printed on the surface of the sheet; and the sheet is baked in a reducing atmosphere such as nitrogen or the like. A component which is composed of PbO, SiO2 or the like is used as the component of the glass to be added. Thereby, its coefficient of thermal expansion can be made nearly equal to that of a ceramic, it is possible to prevent a crack from being produced, and a solid solution is not formed by a reaction with the ceramic. |