Uhv chamber for vapour deposition,申请号FR19690022034-传众专利搜索

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发明名称	Uhv chamber for vapour deposition
摘要
申请公布号	FR2014489(A7)	申请公布日期	1970.04.17
申请号	FR19690022034	申请日期	1969.06.30
申请人	KERNFORSCHUNG GMBH	发明人
分类号	B01J3/00;C23C14/56;(IPC1-7):23C13/00	主分类号	B01J3/00
代理机构		代理人
主权项
地址

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