| 摘要 |
<p>PURPOSE:To allow a laser trimming device to immediately stop trimming when a fault occurs in the edge sensor of a probe card by providing a probe position detecting section which reads the position of a probe holder. CONSTITUTION:When the contactor 13 and conductor 14 of an edge sensor 2 become electrically disconnected to each other, a signal is sent from an edge sensor detecting section 4 to a probe controlling section 7, and the probe stops lowering. Then a probe position detecting section 8 measures the position of a probe holder 5 and the positional data of the holder 5 are sent to a trimming controlling section 9. When the position of the holder 5 is lower than a prescribed position, it is discriminated that the holder 5 is at a normal position and trimming is continued. However, when the positional data of the holder 5 measured by the section 8 are higher than the prescribed position, it is discriminated that a fault occurs in the edge sensor 2 or the holder 5 is not lowered due to a certain fault occurring in this laser trimming device and the trimming is stopped.</p> |
