THIN FILM FORMING EQUIPMENT AND THIN FILM FORMING METHOD,申请号JP19900301494-传众专利搜索

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发明名称	THIN FILM FORMING EQUIPMENT AND THIN FILM FORMING METHOD
摘要
申请公布号	JPH04171923(A)	申请公布日期	1992.06.19
申请号	JP19900301494	申请日期	1990.11.06
申请人	MATSUSHITA ELECTRON CORP	发明人	FUJII SHINJI
分类号	H01L21/285;H01L21/28	主分类号	H01L21/285
代理机构		代理人
主权项
地址

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