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经营范围
发明名称
HEAT TREATMENT EQUIPMENT
摘要
申请公布号
JPH04171920(A)
申请公布日期
1992.06.19
申请号
JP19900300410
申请日期
1990.11.06
申请人
TOKYO ELECTRON SAGAMI LTD
发明人
HIDANO MASARU;MORIKAWA SUSUMU
分类号
H01L21/205;H01L21/22;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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