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发明名称
METHOD OF PLUGGING-UP CONTACT HOLE
摘要
申请公布号
JPH04171922(A)
申请公布日期
1992.06.19
申请号
JP19900301950
申请日期
1990.11.06
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
TERAI YUKA;FUJII TOYOKAZU;HIRAO HIDEJI;YAMAMOTO HIROSHI
分类号
H01L21/28;H01L21/285;H01L21/302;H01L21/3065
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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