发明名称 CANTILEVER PROBE AND APPARATUS USING THE SAME
摘要 A cantilever probe comprising a cantilever displacement element containing a piezoelectric material provided between driving electrodes for causing displacement of the piezoelectric material, a probe for information input and output provided on the free end of the element, a drawing electrode for the probe and, a non-electroconductive thin film provided on at least a portion of an end of the element. <IMAGE>
申请公布号 CA2057619(A1) 申请公布日期 1992.06.18
申请号 CA19912057619 申请日期 1991.12.13
申请人 CANON KABUSHIKI KAISHA 发明人 YAGI, TAKAYUKI;HIRAI, YUTAKA;TAKAMATSU, OSAMU;NAKAYAMA, MASARU;KASANUKI, YUJI;YAMAMOTO, KEISUKE;SHIMADA, YASUHIRO;SUZUKI, YOSHIO
分类号 B81B3/00;G01N27/00;G01Q10/00;G01Q10/04;G01Q60/16;G01Q70/14;G01Q80/00;G11B9/00;G11B9/14;H01J37/28;H01L21/66;H01L41/09;H01L41/22 主分类号 B81B3/00
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