发明名称 |
CANTILEVER PROBE AND APPARATUS USING THE SAME |
摘要 |
A cantilever probe comprising a cantilever displacement element containing a piezoelectric material provided between driving electrodes for causing displacement of the piezoelectric material, a probe for information input and output provided on the free end of the element, a drawing electrode for the probe and, a non-electroconductive thin film provided on at least a portion of an end of the element. <IMAGE> |
申请公布号 |
CA2057619(A1) |
申请公布日期 |
1992.06.18 |
申请号 |
CA19912057619 |
申请日期 |
1991.12.13 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
YAGI, TAKAYUKI;HIRAI, YUTAKA;TAKAMATSU, OSAMU;NAKAYAMA, MASARU;KASANUKI, YUJI;YAMAMOTO, KEISUKE;SHIMADA, YASUHIRO;SUZUKI, YOSHIO |
分类号 |
B81B3/00;G01N27/00;G01Q10/00;G01Q10/04;G01Q60/16;G01Q70/14;G01Q80/00;G11B9/00;G11B9/14;H01J37/28;H01L21/66;H01L41/09;H01L41/22 |
主分类号 |
B81B3/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|