SCHICHT AUS SAUERSTOFFUNDURCHLAESSIGEM MATERIAL AUF EINEM HALBLEITERSUBSTRAT.
摘要
An oxygen-impervious pad structure which reduces the bird's beak profiles in semi-recessed oxide isolation regions. The sidewalls of a conventional silicon oxide - silicon nitride pad are coated with a thick layer of oxynitride. A thin layer of oxynitride is grown on the substrate surface prior to deposition of the thick oxynitride layer. The thick oxynitride layer prevents lateral oxidizing specie diffusion through the oxide layer of the conventional pad, and the thin oxynitride layer prevents lateral oxidizing specie diffusion through the pad-substrate interface into the substrate region beneath the pad.
申请公布号
DE3685224(D1)
申请公布日期
1992.06.17
申请号
DE19863685224
申请日期
1986.01.17
申请人
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US
发明人
GEIPEL, JR., HENRY JOHN;PAN, PAI-HUNG, ESSEX JUNCTION VERMONT 05452, US